Management method and management device for technical formula in semiconductor device

Management method and management device for technical formula in semiconductor device

  • CN 105,787,614 A
  • Filed: 12/22/2014
  • Published: 07/20/2016
  • Est. Priority Date: 12/22/2014
  • Status: Active Application
First Claim
Patent Images

1. the management method of technical recipe in a semiconductor equipment, it is characterised in that comprise the following steps:

  • Obtain the user name of user, and obtain formulation types and the attribute information of target process formula;

    Formulation types according to current goal technical recipe, it is judged that current goal technical recipe belongs to father'"'"'s formula and still falls within sub-formula;

    Belong to the operating procedure of father'"'"'s formula;

    active user can edit the current goal technical recipe that oneself creates;

    Belong to the operating procedure of sub-formula;

    active user can edit the current goal technical recipe that oneself creates and is not used by father'"'"'s formula of other users;

    Current goal technical recipe is used by father'"'"'s formula of other users else if, then active user is only capable of and current goal technical recipe is performed read-only operation.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×