GLASS CERAMIC FOR ULTRAVIOLET LITHOGRAPHY AND METHOD OF MANUFACTURING THEREOF

GLASS CERAMIC FOR ULTRAVIOLET LITHOGRAPHY AND METHOD OF MANUFACTURING THEREOF

  • CN 105,829,259 A
  • Filed: 12/19/2014
  • Published: 08/03/2016
  • Est. Priority Date: 12/22/2013
  • Status: Active Application
First Claim
Patent Images

1. the method manufacturing extreme ultraviolet substrate, comprises the steps ofGlass ceramics block is provided;

  • Glass ceramic baseplate is formed from described glass ceramics block;

    AndDeposition flatness layer is on described glass ceramic baseplate.

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