Method for measuring penetration depth of laser beam into workpiece and laser processing equipment

Method for measuring penetration depth of laser beam into workpiece and laser processing equipment

  • CN 105,829,828 B
  • Filed: 09/13/2014
  • Issued: 02/02/2021
  • Est. Priority Date: 09/23/2013
  • Status: Active Grant
First Claim
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1. A method for measuring the penetration depth (d) of a laser beam (19) into a workpiece (24), the method comprising the steps of:

  • a) focusing the laser beam (19) in a focal point (22) by means of a focusing optical device (32) arranged in a machining head (14), whereby the focal point produces a vapor capillary (88) in the workpiece;

    b) generating a first measurement beam (70a) and a second measurement beam (70b) with an optical coherence tomography (40);

    c) aligning the first measurement beam (70a) at a first measurement point (MPa) in the vapor capillary (88) to thereby measure a first distance (a1) between a reference point and the first measurement point;

    d) simultaneously with step c), aligning the second measurement beam (70b) at a second measurement point (MPb) on a surface (92) of the workpiece (24) facing the processing head (14) outside the vapor capillary (88) in order to thereby measure a second distance (a2) between the reference point and the second measurement point;

    e) determining a skin depth (d) of the laser beam (19) from the first distance (a1) and the second distance (a

         2);

    it is characterized in that the preparation method is characterized in that,in step d), the second measuring beam (70b) is gradually directed with the scanning device (113) at different second measuring points (MPb) on the surface (92) of the workpiece (24),the first measuring beam and the second measuring beam are separated by a space without measuring beams when reaching the workpiece (24),at least some of the different second measurement points (MPb) are located on a circle (102) surrounding the vapor capillary (88).

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