Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems
Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems
- CN 105,845,551 A
- Filed: 02/03/2016
- Published: 08/10/2016
- Est. Priority Date: 02/03/2015
- Status: Active Application
- EN CH
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- Pin
