Atomic force microscope-based multifunctional combined probe system

Atomic force microscope-based multifunctional combined probe system

  • CN 105,891,549 A
  • Filed: 04/08/2016
  • Published: 08/24/2016
  • Est. Priority Date: 04/08/2016
  • Status: Active Application
First Claim
Patent Images

1. a multifunctional combination probe system based on atomic force microscope, it is characterised in that:

  • include vacuum cavity (1), peaceThe cavity upper cover (2) being contained on vacuum cavity (1) and the optical window top cover (3) being arranged on cavity upper cover (2);

    Optical window top cover(3) and place between cavity upper cover (2) and lead to light lamella lucida;

    Vacuum cavity (1) internally installed probe switching platform (5) andSample stage.

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