Part and method for improving MOCVD reaction process

Part and method for improving MOCVD reaction process

  • CN 105,986,245 A
  • Filed: 02/16/2015
  • Published: 10/05/2016
  • Est. Priority Date: 02/16/2015
  • Status: Active Application
First Claim
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1. improve parts for MOCVD reaction process, including a stainless steel main body, it is characterised in that:

  • instituteState stainless steel body surfaces coating layer protecting film, the composition of described diaphragm include by aluminium, gallium,The compound of at least one composition at least one and nitrogen in magnesium, oxygen, or not with MOCVDThe other materials of the gas reaction in technique, described diaphragm has fine and close group that gas porosity is zeroKnit.

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