MEMS acceleration sensor and preparation method thereof, and electronic device

MEMS acceleration sensor and preparation method thereof, and electronic device

  • CN 106,033,091 A
  • Filed: 03/11/2015
  • Published: 10/19/2016
  • Est. Priority Date: 03/11/2015
  • Status: Active Application
First Claim
Patent Images

1. a MEMS acceleration transducer, including:

  • Semiconductor substrate;

    First detection mass, the unsettled top being arranged at described Semiconductor substrate;

    Second detection mass, is connected in the top of described first detection mass and sets with levelThe described first detection mass put is parallel;

    Spring structure, described spring structure is in being horizontally disposed with, and one end of described spring structure is positioned at describedOr/and on described second quality testing block, the end of the described spring structure other end leads on one detection massCross sacrificial material layer below to be fixed in described Semiconductor substrate;

    Wherein, described first detection mass include the first mass elements and with described first mass elements phaseConnect the first interdigital structure, second detection mass include the second mass elements and with described second massThe second interdigital structure that element is connected.

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