Detection method for surface shape error of large-diameter ring polishing correction disc

Detection method for surface shape error of large-diameter ring polishing correction disc

  • CN 106,225,647 B
  • Filed: 10/09/2016
  • Issued: 03/31/2020
  • Est. Priority Date: 10/09/2016
  • Status: Active Grant
First Claim
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1. The method for detecting the surface shape error of the large-caliber ring polishing correction disc is characterized in that a straightness accuracy meter bridge (12) with a probe (15) in the middle is adopted to detect the straightness accuracy of each subsection along the radius direction of the correction disc in a segmented mode, and then the straightness accuracy of the whole radius direction is obtained through data processing;

  • the detection method comprises the following steps;

    1) a relatively straight-line meter bridge;

    the detection distance of the linear meter bridge (12) is 1/2-1/4 of the radius of the correction disc;

    2) detecting and correcting the square profile of the disc along the radius in a segmented manner;

    the method specifically comprises the following steps;

    wiping clean the working surface of the correction disc (2);

    marking any radius of the working surface of the correction disc (2), marking the center of the correction disc (2) as a 0 th detection point, and sequentially marking 1 st, 2 nd, …

    th and n th detection points along the radius from inside to outside by taking half of the detection distance of the linear meter bridge (12) as a distance;

    sequentially detecting 0 th to n-1 th points by adopting a linear meter bridge (12), wherein a probe (15) in the middle of the linear meter bridge (12) is positioned at the position marked by the point when each point is detected, supporting points at two ends of the linear meter bridge (12) are positioned in the radius direction of the mark, the detection mode of the handheld linear meter bridge (12) during detection is the same as that during calibration of the linear meter bridge (12), so that the detection precision of the linear meter bridge (12) is ensured, and the detection results of each point are respectively marked as z0, z1, z2, … and

    zn-1;

    3) generating the surface shape of the correction disc according to the segmented detection data, and solving the height of each detection point to obtain the surface shape of the correction disc and the error thereof;

    the method specifically comprises the following steps;

    establishing a rectangular coordinate system by taking the center of the working surface of the correction disc (2) as an original point, the radius marked on the working surface as the positive direction of an X axis and the center of the working surface which is vertically outward as the positive direction of a Y axis;

    the height (hi) of the middle probe (15) corresponding to the detection point and the heights (hi-1, hi +1) corresponding to the supporting points at the two ends meet the following relation;

    hi=

    (hi-1+hi+1)/2+zi(1)wherein zi is a detection value of the linear meter bridge (12);

    setting the height of the origin of the center of the correction disc to 0(h0 is

         0) as a reference height;

    for the 1 st detection point (i is

         1), the surface shape of the correction disc (2) is distributed in a central symmetry mode, namely;

    h-1 ═

    h1, and thus can be obtained according to formula (1);

    h1=

    -z0(2)for the heights of other detection points (i ≧

         2), the following can be found from equation (1);

    hi +1 ═

    2(hi-zi) -hi-1, i.e., hi ═

    2(hi-1-zi-1) -hi-2 (3).

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