Detection method for surface shape error of largediameter ring polishing correction disc
Detection method for surface shape error of largediameter ring polishing correction disc
 CN 106,225,647 B
 Filed: 10/09/2016
 Issued: 03/31/2020
 Est. Priority Date: 10/09/2016
 Status: Active Grant
First Claim
1. The method for detecting the surface shape error of the largecaliber ring polishing correction disc is characterized in that a straightness accuracy meter bridge (12) with a probe (15) in the middle is adopted to detect the straightness accuracy of each subsection along the radius direction of the correction disc in a segmented mode, and then the straightness accuracy of the whole radius direction is obtained through data processing;
 the detection method comprises the following steps;
1) a relatively straightline meter bridge;
the detection distance of the linear meter bridge (12) is 1/21/4 of the radius of the correction disc;
2) detecting and correcting the square profile of the disc along the radius in a segmented manner;
the method specifically comprises the following steps;
wiping clean the working surface of the correction disc (2);
marking any radius of the working surface of the correction disc (2), marking the center of the correction disc (2) as a 0 th detection point, and sequentially marking 1 st, 2 nd, …
th and n th detection points along the radius from inside to outside by taking half of the detection distance of the linear meter bridge (12) as a distance;
sequentially detecting 0 th to n1 th points by adopting a linear meter bridge (12), wherein a probe (15) in the middle of the linear meter bridge (12) is positioned at the position marked by the point when each point is detected, supporting points at two ends of the linear meter bridge (12) are positioned in the radius direction of the mark, the detection mode of the handheld linear meter bridge (12) during detection is the same as that during calibration of the linear meter bridge (12), so that the detection precision of the linear meter bridge (12) is ensured, and the detection results of each point are respectively marked as z0, z1, z2, … and
zn1;
3) generating the surface shape of the correction disc according to the segmented detection data, and solving the height of each detection point to obtain the surface shape of the correction disc and the error thereof;
the method specifically comprises the following steps;
establishing a rectangular coordinate system by taking the center of the working surface of the correction disc (2) as an original point, the radius marked on the working surface as the positive direction of an X axis and the center of the working surface which is vertically outward as the positive direction of a Y axis;
the height (hi) of the middle probe (15) corresponding to the detection point and the heights (hi1, hi +1) corresponding to the supporting points at the two ends meet the following relation;
hi＝
(hi1+hi+1)/2+zi(1)wherein zi is a detection value of the linear meter bridge (12);
setting the height of the origin of the center of the correction disc to 0(h0 is
0) as a reference height;
for the 1 st detection point (i is
1), the surface shape of the correction disc (2) is distributed in a central symmetry mode, namely;
h1 ═
h1, and thus can be obtained according to formula (1);
h1＝
z0(2)for the heights of other detection points (i ≧
2), the following can be found from equation (1);
hi +1 ═
2(hizi) hi1, i.e., hi ═
2(hi1zi1) hi2 (3).
Chinese PRB Reexamination
Abstract
The invention provides a method for detecting surface shape errors of a largesize correction disc in annular polishing. The method for detecting the surface shape error of the largecaliber ring polishing correction disk adopts a linear meter bridge with a probe in the middle to detect the straightness of each subsection along the radius direction of the correction disk in a segmented manner, and then obtains the straightness in the whole radius direction through data processing. Aiming at the problems that the working surface of a largesize correction disc is downward and difficult to turn, the invention adopts a linear meter bridge to detect the profile of the correction disc along the radius square in a segmented manner according to the characteristic that the surface shape of the correction disc is centrosymmetrically distributed, and then generates the whole radial profile of the correction disc through data processing. The method can detect the surface shape error of the largesize correction disc of the largesize ring polishing machine, the detection process is simple and convenient, the precision is high, the surface shape of the correction disc is obtained by the method, and the shape of the asphalt polishing disc can be conjectured, so that the ring polishing process parameters are adjusted to improve the surface shape precision of the optical element.
2 Claims

1. The method for detecting the surface shape error of the largecaliber ring polishing correction disc is characterized in that a straightness accuracy meter bridge (12) with a probe (15) in the middle is adopted to detect the straightness accuracy of each subsection along the radius direction of the correction disc in a segmented mode, and then the straightness accuracy of the whole radius direction is obtained through data processing;

the detection method comprises the following steps; 1) a relatively straightline meter bridge;
the detection distance of the linear meter bridge (12) is 1/21/4 of the radius of the correction disc;2) detecting and correcting the square profile of the disc along the radius in a segmented manner;
the method specifically comprises the following steps;
wiping clean the working surface of the correction disc (2);
marking any radius of the working surface of the correction disc (2), marking the center of the correction disc (2) as a 0 th detection point, and sequentially marking 1 st, 2 nd, …
th and n th detection points along the radius from inside to outside by taking half of the detection distance of the linear meter bridge (12) as a distance;
sequentially detecting 0 th to n1 th points by adopting a linear meter bridge (12), wherein a probe (15) in the middle of the linear meter bridge (12) is positioned at the position marked by the point when each point is detected, supporting points at two ends of the linear meter bridge (12) are positioned in the radius direction of the mark, the detection mode of the handheld linear meter bridge (12) during detection is the same as that during calibration of the linear meter bridge (12), so that the detection precision of the linear meter bridge (12) is ensured, and the detection results of each point are respectively marked as z0, z1, z2, … and
zn1;3) generating the surface shape of the correction disc according to the segmented detection data, and solving the height of each detection point to obtain the surface shape of the correction disc and the error thereof;
the method specifically comprises the following steps;
establishing a rectangular coordinate system by taking the center of the working surface of the correction disc (2) as an original point, the radius marked on the working surface as the positive direction of an X axis and the center of the working surface which is vertically outward as the positive direction of a Y axis;
the height (hi) of the middle probe (15) corresponding to the detection point and the heights (hi1, hi +1) corresponding to the supporting points at the two ends meet the following relation;hi＝
(hi1+hi+1)/2+zi(1)wherein zi is a detection value of the linear meter bridge (12);
setting the height of the origin of the center of the correction disc to 0(h0 is
0) as a reference height;
for the 1 st detection point (i is
1), the surface shape of the correction disc (2) is distributed in a central symmetry mode, namely;
h1 ═
h1, and thus can be obtained according to formula (1);h1＝
z0(2)for the heights of other detection points (i ≧
2), the following can be found from equation (1);hi +1 ═
2(hizi) hi1, i.e., hi ═
2(hi1zi1) hi2 (3).


2. The method for detecting the surface shape error of the largecaliber ring polishing correction disc according to claim 1, wherein the step 1) is as follows:
 two table platforms (8) with the same height are parallelly and separately placed, the distance between the two table platforms is ensured to be between the length of a linear meter bridge (12) and the length of a flat ruler (10), and then the working surface of the flat ruler (10) is placed on the two table platforms (8) in a downward crossing mode;
respectively holding two ends of a linear meter bridge (12), supporting the supporting points at the two ends of the linear meter bridge from bottom to top to the working surface of a flat ruler (10), enabling a probe (15) in the middle of the linear meter bridge (12) to be in contact with the working surface of the flat ruler (10), and displaying the extending height of the probe (15) through a dial indicator (16);
finally, the dial indicator (16) is adjusted to zero in the pointer reading, so that the calibration of the linear meter bridge (12) is realized.
 two table platforms (8) with the same height are parallelly and separately placed, the distance between the two table platforms is ensured to be between the length of a linear meter bridge (12) and the length of a flat ruler (10), and then the working surface of the flat ruler (10) is placed on the two table platforms (8) in a downward crossing mode;
Specification(s)