Grazing-incidence interferometer with dual-side measurement capability

Grazing-incidence interferometer with dual-side measurement capability

  • CN 106,415,191 A
  • Filed: 08/14/2014
  • Published: 02/15/2017
  • Est. Priority Date: 08/19/2013
  • Status: Active Application
First Claim
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1. a kind of grazing-incidence interferometer, for the surface of object analysis, described grazing-incidence interferometer includes:

  • First diffraction optical element (DOE), is arranged to receive substantially relevant light beam and therefrom form zeroDiffraction orders light beam and the first diffraction orders light beam, wherein said first diffraction orders light beam is with grazing angle from described object tableFace is reflected, and described zero diffraction orders light beam is unreflected;

    2nd DOE, is arranged to receive unreflected zero diffraction orders light beam and the first diffraction orders light beam reflecting and incite somebody to actionFirst diffraction orders light beam of unreflected zero diffraction orders light beam and reflection combines to form the combination light of substantially collimationBundle;

    1X doubly telecentric relay system, has the optical axis coaxial with described combination light beam and is sized to only transmissionOr reflect the aperture diaphragm of described combination light beam;

    AndScreen, is substantially tilted with described grazing angle.

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