Single-table write-through exposure machine

Single-table write-through exposure machine

CN
  • CN 106,527,056 A
  • Filed: 12/20/2016
  • Published: 03/22/2017
  • Est. Priority Date: 12/20/2016
  • Status: Active Application
First Claim
Patent Images

1. a kind of single table surface write-through exposure machine, including base, base are provided with gantry upright post, and gantry upright post is provided with X axisThe exposure cameras of arrangement, it is characterised in that:

  • Also include workbench, workbench be provided with underframe, on underframe for demarcatingThe demarcating module of exposure cameras and the demarcation module for driving demarcating module X-direction to slide, are provided with use below workbenchIn the first driving module for driving workbench X-direction to slide, base be provided with for drive that workbench Y direction slides theTwo drive module, the first driving module to be arranged on above the second driving module;

    Demarcating module includes that X-direction is arranged on underframeScrew mandrel, the lead screw motor that drive screw is rotated and connection wire rod and lead screw motor shaft coupling, demarcating module is enclosed within screw mandrelOn.

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