The manufacturing process of the SPIN diode components of frequency reconfigurable dipole antenna

The manufacturing process of the SPIN diode components of frequency reconfigurable dipole antenna

  • CN 106,816,685 A
  • Filed: 12/20/2016
  • Published: 06/09/2017
  • Est. Priority Date: 12/20/2016
  • Status: Active Application
First Claim
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1. a kind of manufacturing process of the SPIN diode components of frequency reconfigurable dipole antenna, it is characterised in that the SPINDiode component is used to manufacture the frequency reconfigurable dipole antenna, and the frequency reconfigurable dipole antenna includes:

  • Si basesSoi semiconductor substrate (1);

    Be fixed on first antenna arm (2) on Si base soi semiconductors substrate (1), the second antenna arm (3) andCoaxial feeder (4);

    The first antenna arm (2) and second antenna arm (3) are respectively arranged at the two of the coaxial feeder (4)Side and including multiple SPIN diodes strings, when antenna is in running order, the first antenna arm (2) and second antennaArm (3) realizes the regulation of antenna arm lengths according to the conducting of multiple SPIN diodes strings with shut-off;

    Wherein, the manufacture method of the SPIN diodes comprises the following steps:

    Selection SOI substrate (101);

    Etch the SOI substrate (101) and form isolation channel, fill the isolation channel and form isolated area (301);

    Etch the SOI substrate (101) and form P areas'"'"' deep trouth (501) and N areas deep trouth (502);

    P is formed by the way of ion implanting in P areas deep trouth (501) and N areas deep trouth (502)+Active area (601)And N+Active area (602);

    Lead is generated in the SOI substrate (101).

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