A kind of optical corner speculum and its manufacture method

A kind of optical corner speculum and its manufacture method

  • CN 106,986,299 A
  • Filed: 01/20/2016
  • Published: 07/28/2017
  • Est. Priority Date: 01/20/2016
  • Status: Active Application
First Claim
Patent Images

1. a kind of manufacture method of optical corner speculum, for manufacturing optical corner speculum on monocrystalline silicon substrate,Characterized in that, this method includes:

  • In substrate surface formation etching mask, the etching mask, which has, makes the opening that the substrate surface exposes, describedSubstrate is monocrystalline silicon piece;

    Wet etching is carried out to the substrate for being formed with etching mask, to form cutting, the cutting at least has phaseMutual vertical two side walls, two side walls are silicon (110) crystal face, and two side walls and the substrateSurface angle be 45 °



    AndIn two side wall covering reflection layers of the cutting, to form corner cube mirror in the cutting.

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