A kind of controllable manufacture method of metal aperture

A kind of controllable manufacture method of metal aperture

  • CN 107,140,600 A
  • Filed: 05/16/2017
  • Published: 09/08/2017
  • Est. Priority Date: 05/16/2017
  • Status: Active Application
First Claim
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1. a kind of controllable manufacture method of metal aperture, it is characterised in that the preparation method comprises the following steps:

  • 1) substrate is provided;

    2) the surface deposition by deposition process in the substrate has metallic film;

    3) metal bore region is set;

    4) metallic film in the metal bore region being set using ion beam irradiation, etches metal aperture.

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