Semiconductor processing device

Semiconductor processing device

  • CN 107,275,178 B
  • Filed: 04/06/2016
  • Issued: 12/08/2020
  • Est. Priority Date: 04/06/2016
  • Status: Active Grant
First Claim
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1. A semiconductor processing device comprises a radio frequency power supply, an impedance matching unit and a processing chamber, wherein the radio frequency power supply is connected with the impedance matching unit and is used for transmitting radio frequency energy to the processing chamber;

  • the impedance matching unit is connected with the processing chamber and is used for matching the impedance of the processing chamber with the impedance of the radio frequency power supply, and the impedance matching unit is characterized by comprising a collecting part, a control part, an impedance matching part and a switching element, wherein the impedance matching part is connected with the switching element;

    the processing chamber comprises at least two, and the switching element is used for switching and transmitting the radio frequency energy to one processing chamber.

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