Uncooled infrared detector with low time constant

Uncooled infrared detector with low time constant

  • CN 107,290,067 B
  • Filed: 04/01/2016
  • Issued: 07/30/2021
  • Est. Priority Date: 04/01/2016
  • Status: Active Grant
First Claim
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1. An infrared detector comprises an infrared detector chip and a packaging structure, wherein the infrared detector chip comprises a reading circuit substrate and one or more micro-bridge structures positioned on the reading circuit substrate, each micro-bridge structure comprises a connecting column, a heat absorbing structure and a heat insulation beam for connecting the connecting column and the heat absorbing structure, the heat absorbing structure comprises a thin film, and the thin film comprises an infrared absorbing material, a thermosensitive material and an electrode material;

  • said infrared detector being characterized in that said infrared detector includes one or more characteristic quantities selected such that a thermal time constant of said infrared detector is less than a predetermined value;

    when the characteristic parameter comprises the thermal conductance corresponding to the gas of the packaging structure, the characteristic parameter also comprises the gas pressure and/or the type of the gas in the packaging structure;

    the gas pressure and/or the gas type in the packaging structure are/is selected, and the gas pressure packaged by the infrared detector chip is controlled to adjust the thermal conductance generated by the gas;

    the gas type comprises macromolecular inert gas, so that the requirement on the vacuum degree is relaxed, the packaging difficulty is further reduced, and the matching of the macromolecular inert gas and the packaging gas pressure is utilized, so that the random regulation and control of the thermal time constant are realized by selecting the related parameters of the packaging.

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