charged particle microscope with in-situ deposition function

charged particle microscope with in-situ deposition function

  • CN 107,437,489 A
  • Filed: 12/29/2016
  • Published: 12/05/2017
  • Est. Priority Date: 05/27/2016
  • Status: Active Application
First Claim
Patent Images

1. a kind of charged particle microscope, including vacuum chamber, provided in the vacuum chamber:

  • - sample holder, it is used to sample being maintained at irradiation position;

    - particle-optical column, it is used to produce charged particle beam and guides the charged particle beam so as to irradiate the sample;

    - detector, it is used in response to detecting the radiation flux sent from sample by the beam exposure,It is characterized in that:

    - the vacuum chamber includes magnetron sputter deposition module in situ, and it includes the magnetic for being used to produce the vapor stream of target materialKeyholed back plate sputtering source;

    - microscope carrier is configured to make at least one of sample for including the sample in the irradiation position and the deposition mouldMoved between independent deposition position at block;

    - the deposition module is configured to one layer of target material when the sample is maintained at the deposition positionMaterial is deposited on the sample.

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