A kind of β Ga2O3Base solar blind UV electric explorer array and preparation method thereof

A kind of β Ga2O3Base solar blind UV electric explorer array and preparation method thereof

  • CN 107,507,876 A
  • Filed: 08/28/2017
  • Published: 12/22/2017
  • Est. Priority Date: 08/28/2017
  • Status: Active Grant
First Claim
Patent Images

1. A kind of 1. β

  • -Ga2O3Base solar blind UV electric explorer array, it is characterised in that be followed successively by from top to bottom by level:

    β

    -Ga2O3Light absorbing layer, lower electrode layer, sull insulating barrier and upper electrode layer;

    β

    -Ga2O3Light absorbing layer in single crystalline substrate by growing β

    -Ga2O3Film;

    In β

    -Ga2O3Pass through lower electricity on light absorbing layerPole mask plate prepares lower electrode layer, obtains column wire and interdigital electrode;

    Described column wire is in β

    -Ga2O3Light absorbing layer surface etc.Spacing is arranged, and some interdigital electrodes of equidistantly being arranged on each column wire, each interdigital electrode is arranged with column wire in equal angularRow;

    Sull insulating barrier is made by the block array mask plate that insulate on lower electrode layer, then insulated in sullUpper electrode layer is made with electrode mask plate on layer, obtains row conductor;

    Described row conductor is equidistantly arranged perpendicular to column wire,The cross section intermediate arrangement sull insulating barrier of row conductor and column wire;

    The other end connection of each interdigital electrode is expert atOn wire.

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