Xenon lamp Excimer UV photooxidation vacuum equipment and its application method

Xenon lamp Excimer UV photooxidation vacuum equipment and its application method

  • CN 107,546,100 A
  • Filed: 06/24/2016
  • Published: 01/05/2018
  • Est. Priority Date: 06/24/2016
  • Status: Active Application
First Claim
Patent Images

1. A kind of 1. xenon lamp Excimer UV photooxidation vacuum equipment, it is characterised in that including:

  • Vacuum chamber, controlling organization is provided with vacuum chamber;

    Xenon lamp quasi-molecule discharging tube, xenon lamp quasi-molecule discharging tube are arranged on inside vacuum chamber, in xenon lamp quasi-molecule discharging tubeInterior to be provided with water cooling plant, xenon lamp quasi-molecule discharging tube is connected with controlling organization;

    Specimen holder, bottom of the specimen holder from outside through vacuum chamber enters inside vacuum chamber, and specimen holder and xenonLamp quasi-molecule discharging tube is parallel;

    Oxygen intake, nitrogen inlet and exhaust outlet, oxygen intake, nitrogen inlet and exhaust outlet are arranged on vacuum chamberIn side wall, oxygen intake, nitrogen inlet and exhaust outlet connect with the inner chamber of vacuum chamber;

    Set-up of control system is on vacuum chamber.

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