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A kind of vertical interconnected method of three-dimensional silicon hole based on carbon nanomaterial composite construction

A kind of vertical interconnected method of three-dimensional silicon hole based on carbon nanomaterial composite construction

  • CN 107,658,263 A
  • Filed: 09/28/2017
  • Published: 02/02/2018
  • Est. Priority Date: 09/28/2017
  • Status: Active Grant
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