Element semiconductor transverse double-diffusion transistor with multi-ring electric field modulation substrate

Element semiconductor transverse double-diffusion transistor with multi-ring electric field modulation substrate

  • CN 107,681,004 B
  • Filed: 09/11/2017
  • Issued: 08/20/2021
  • Est. Priority Date: 09/11/2017
  • Status: Active Grant
First Claim
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1. An elemental semiconductor lateral double diffused transistor having a multi-ring electric field modulated substrate, comprising:

  • a substrate of semiconductor material;

    the base region and the drift region are positioned on the surface of the substrate;

    the source region is positioned on the surface of the base region;

    the drain region is positioned on the surface of the drift region;

    the method is characterized in that;

    the substrate is an elemental semiconductor material;

    the substrate area adjacent to the lower part of the drift area is set to be a multi-ring electric field modulation structure;

    the width of the multi-ring electric field modulation structure is equivalent to that of the drift region, and the multi-ring electric field modulation structure takes one end close to the drain region as a center and expands towards one end close to the base region to form a plurality of rings;

    the ratio of the radial width of each ring to the overall length of the drift region is 0.2-0.5, and the multi-ring electric field modulation structure does not exceed the overall length of the drift region;

    the radial widths of all rings in the multi-ring electric field modulation structure are equal or different;

    the number of the rings in the multi-ring electric field modulation structure is 2-5;

    each ring of the multi-ring electric field modulation structure is made of an N-type or P-type doped element semiconductor material or a dielectric material;

    accordingly, adjacent rings are distinguished by any one or any combination of different materials, different doping types, different doping concentrations.

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