Method for treating a workpiece

Method for treating a workpiece

  • CN 107,710,423 B
  • Filed: 06/03/2016
  • Issued: 01/12/2021
  • Est. Priority Date: 07/15/2015
  • Status: Active Grant
First Claim
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1. A method of processing a workpiece, comprising:

  • implanting boron into a first surface of the workpiece;

    exposing the workpiece to a short heat treatment while returning the workpiece to a carrier after the implanting, causing boron to out-diffuse from the first surface of the workpiece; and

    after the exposing, simultaneously subjecting the workpiece and at least another workpiece to an annealing process, driving the implanted boron into the workpiece, repairing damage caused by the implanting and activating the boron, wherein upon the annealing process, the workpiece and the at least another workpiece are stacked in the carrier such that a front surface of the workpiece is adjacent to a back surface of the at least another workpiece.

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