The transfer method and transfer device of semiconductor microactuator element

The transfer method and transfer device of semiconductor microactuator element

  • CN 107,818,931 A
  • Filed: 09/30/2017
  • Published: 03/20/2018
  • Est. Priority Date: 09/30/2017
  • Status: Active Application
First Claim
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1. a kind of transfer method of semiconductor microactuator element, the transfer method of the semiconductor microactuator element includes step:



  • 1)

    Bonded layer is set on substrate, and bonded layer has supporting construction;



    2)

    Semiconductor microactuator element is connected by supporting construction with bonded layer;

    It is characterized in that:

    There is through hole, when removing semiconductor microactuator element, from through hole to semiconductor in the supporting construction of bonded layerMicrocomponent applies thrust, allows semiconductor microactuator element to be separated with bonded layer.

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