A kind of graticle and preparation method thereof

A kind of graticle and preparation method thereof

  • CN 108,152,987 A
  • Filed: 12/27/2017
  • Published: 06/12/2018
  • Est. Priority Date: 12/27/2017
  • Status: Active Application
First Claim
Patent Images

1. a kind of graticle, which is characterized in that including:

  • Supporting body, the supporting body include first surface and the second surface being oppositely arranged with first surface;

    Antireflection layer, the antireflection layer are set on the first surface and/or second surface;

    Division line, the division line is located at the first surface side of the supporting body, and the division line is made of metal;

    Structure is protected, the protection structure coats the division line;

    Wherein, the division line reflectivity is not less than 95%, and the supporting body entirety transmitance equipped with antireflection layer is not less than 95%.

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