For the preparation method of the GeTe/Sb class superlattices phase change film materials of high-speed phase change memory
For the preparation method of the GeTe/Sb class superlattices phase change film materials of high-speed phase change memory
- CN 108,258,114 A
- Filed: 04/27/2015
- Published: 07/06/2018
- Est. Priority Date: 04/27/2015
- Status: Active Application