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For the preparation method of the GeTe/Sb class superlattices phase change film materials of high-speed phase change memory

For the preparation method of the GeTe/Sb class superlattices phase change film materials of high-speed phase change memory

  • CN 108,258,114 A
  • Filed: 04/27/2015
  • Published: 07/06/2018
  • Est. Priority Date: 04/27/2015
  • Status: Active Application
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