Mask plate and its manufacturing method, mask set, evaporation coating method

Mask plate and its manufacturing method, mask set, evaporation coating method

  • CN 108,365,134 A
  • Filed: 02/11/2018
  • Published: 08/03/2018
  • Est. Priority Date: 02/11/2018
  • Status: Active Application
First Claim
Patent Images

1. a kind of mask plate, including the first part of strip and at least side from the first part it is laterally projecting at least oneA second part, whereinThere is Stress relief structure in an at least plate face for the second part.

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