Intelligent film plating process and system

Intelligent film plating process and system

  • CN 108,486,538 A
  • Filed: 04/27/2018
  • Published: 09/04/2018
  • Est. Priority Date: 04/27/2018
  • Status: Active Application
First Claim
Patent Images

1. a kind of intelligence film plating process, which is characterized in that including:

  • The workpiece box for being contained with base material is transported to workbench by transfer robot;

    The base material is placed into detection station by bio-robot after workpiece box taking-up, and institute is obtained in the detection stationThe surface image of base material is stated to detect its surface quality, if meeting preset condition, the bio-robot puts the base materialEnter coating chamber, if being unsatisfactory for the preset condition, the base material is first moved to cleaning station and carried out by the bio-robotRemoving surface, again detection place into the coating chamber after meeting the preset condition;

    The coating chamber is vacuumized, mid frequency sputtering plated film then is carried out to the base material in the coating chamber, plated film is completedAfterwards, the bio-robot takes out aluminium alloy plating piece out of described coating chamber, and the aluminium alloy plating piece is stored in the workIn finished product box on platform, then taken away by the transfer robot.

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