Electrostatic chuck and its manufacturing method

Electrostatic chuck and its manufacturing method

  • CN 108,538,776 A
  • Filed: 03/29/2018
  • Published: 09/14/2018
  • Est. Priority Date: 03/29/2018
  • Status: Active Application
First Claim
Patent Images

1. a kind of electrostatic chuck, including:

  • Electrode, and the dielectric layer that is coated on outside the electrode;

    AndMultiple salient points independent of each other in the dielectric layer upper surface are set;

    The wherein described salient point is by having 10-4-109The non-hydrogen amorphous composition of Ω

    cm resistivity.

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