The production method and tft array substrate of tft array substrate

The production method and tft array substrate of tft array substrate

  • CN 108,598,086 A
  • Filed: 04/20/2018
  • Published: 09/28/2018
  • Est. Priority Date: 04/20/2018
  • Status: Active Grant
First Claim
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1. a kind of production method of tft array substrate, which is characterized in that include the following steps:

  • Substrate (10) step S1, is provided, form grid (20) on the substrate (10) and covers the gate insulator of grid (20)Layer (30);

    Step S2, the active layer (40) being located on gate insulating layer (30) is formed;

    Step S3, electrode material layer (50) and metal material layer are sequentially depositing on gate insulating layer (30) and active layer (40)(60);

    Photoresist pattern (70) is formed on metal material layer (60), the photoresist pattern (70) includes the first photoresist block at interval(71) with the second photoresist block (72), the part of the first photoresist block (71) is in the projection of vertical direction and one end weight of active layer (40)Folded, the part of the second photoresist block (72) is Chong Die with the other end of active layer (40) in the projection of vertical direction;

    First photoresistThe thickness of block (71) is more than the thickness of the second photoresist block (72);

    Step S4, it is to block to perform etching metal material layer (60), electrode material layer (50) with photoresist pattern (70), removal goldBelong to material layer (60), the part that electrode material layer (50) is not blocked by photoresist pattern (70), photoresist pattern (70) is ashedSecond photoresist block (72) is removed, is to block to perform etching metal material layer (60) with the photoresist pattern (70) after ashing, goesThe part that photoresist pattern (70) after not being ashed except metal material layer (60) blocks forms and connects respectively with active layer (40) both endsThe contact electrode (51) and pixel electrode (52) that connect and the source/drain (61) on contact electrode (51).

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