Method for fabricating low-loss optically active device

Method for fabricating low-loss optically active device

  • CN 1,191,981 A
  • Filed: 02/26/1998
  • Published: 09/02/1998
  • Est. Priority Date: 02/26/1997
  • Status: Abandoned Application
First Claim
Patent Images

1. method of making optical active component, described optical active component has by the optical waveguide core area (non-linear core area) that needs nonlinear interaction when the waveguide light signal, do not need the optical waveguide of optical waveguide core area (linear core area) formation of nonlinear interaction, this method may further comprise the steps:

  • On substrate, form and have refractive index that is lower than waveguide core area material and lower caldding layer with light transmission;

    The linear optics polymkeric substance formation linear optics polymeric layer that on lower caldding layer, has the refractive index that is lower than the lower caldding layer material by coating;

    Zone beyond the zone that the lower caldding layer waveguide will be set up forms the first metal layer;

    Etching does not form the linear optics polymeric layer of the first metal layer thereon;

    Has formation non-linear optical polymer layer on the substrate of non-linear core area;

    Remove the non-linear optical polymer layer that is higher than the waveguide core area of depalletizing;

    Remove the first metal layer;

    In the waveguide of removing the first metal layer, form second metal level;

    Remove the linear optics polymkeric substance in the non-second metal level zone;

    WithOn substrate, use and have material formation upper caldding layer lower than waveguide core area refractive index and that have light transmission with linear optics polymkeric substance.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×