Structural method

Structural method

  • CN 1,207,578 A
  • Filed: 07/31/1998
  • Published: 02/10/1999
  • Est. Priority Date: 08/01/1997
  • Status: Abandoned Application
First Claim
Patent Images

1. be used for structuring at least one deck treat that the method for structuring thin layer has following steps:

  • Treating to cover a mask on the structuring thin layer,Under the condition of using mask, will treat the structuring laminate structureization,Remove mask, treat that the deposit again of the material of structuring thin layer is left over this moment andTreat the deposit again of the material of structuring thin layer, be removed by mechanical polishing or chemico-mechanical polishing.

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