Method for controlling semiconductor equipments

Method for controlling semiconductor equipments

  • CN 1,216,395 A
  • Filed: 05/21/1998
  • Published: 05/12/1999
  • Est. Priority Date: 10/31/1997
  • Status: Abandoned Application
First Claim
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1. control process for semiconductor devices for one kind, it comprises the following steps:

  • Reporting to the main frame that is connected with described equipment with unit batch current process conditions of being carried out in an equipment of described semiconductor equipment;

    Whether the process conditions data of determining described report are within the optimum process condition scope of each step that is deposited with in the described host data base;

    If determining the data of described report is in the described scope of optimum process condition, determine whether described report data satisfies the special rules that is deposited with in the described main frame, be not in the scope of described optimum process condition if determine the data of described report, then keep and analyzes by described current PROCESS FOR TREATMENT product with take appropriate measures;

    Satisfy described special rules if determine the data of described report, if then proceed described technology and determine that the data of described report do not satisfy described special rules, the tracking unit of described equipment of interlocking and described main frame simultaneously then, automatically the information stores of described interlocking in described main frame, and stop described technology, till solving wrong technology;

    WithRepeat described above-mentioned steps till finishing whole technologies.

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