Equipment for processing chip

Equipment for processing chip

  • CN 1,275,795 A
  • Filed: 05/19/2000
  • Published: 12/06/2000
  • Est. Priority Date: 05/19/1999
  • Status: Abandoned Application
First Claim
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1. equipment that is used at least one clean room'"'"'s processed wafer, the device that has the production unit that is configured for finishing a production stage in the described clean room, it is characterized in that, crudy for the crudy that is controlled at a production stage of finishing in the production unit or a plurality of production stages of in production unit, finishing, in described production unit (1), be provided with the measurement mechanism (10) that is used for determining technological parameter, the process data that is produced by described measurement mechanism (10) is input in the computer unit (11) that is located in the described production unit (1) continuously, and can draw the characteristic parameter that is used to judge the wafer process quality according to these process datas.

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