Scribing sapphire substrates with a solid state UV laser

Scribing sapphire substrates with a solid state UV laser

  • CN 1,287,442 C
  • Filed: 06/10/2003
  • Issued: 11/29/2006
  • Est. Priority Date: 07/30/2002
  • Status: Active Grant
First Claim
Patent Images

1. make the method for chip from a Sapphire Substrate for one kind, this method comprises:

  • This Sapphire Substrate is installed on a platform;

    Use a solid-state laser that the laser energy pulse is caused a surface of this Sapphire Substrate, this pulse has the wavelength that is lower than 560 nanometers, energy density, spot size, repetition rate and the pulse duration that is enough to cause to sapphire cutting;

    AndMake this pulse act on this Sapphire Substrate, in this Sapphire Substrate, to cut out line by the stroke line pattern.

View all claims
    ×
    ×

    Thank you for your feedback

    ×
    ×