Wafer holder

Wafer holder

  • CN 1,321,333 A
  • Filed: 08/29/2000
  • Published: 11/07/2001
  • Est. Priority Date: 09/03/1999
  • Status: Abandoned Application
First Claim
Patent Images

1. a wafer holder has the retainer body (23) of mounting wafer (22,27) in the above, and above-mentioned retainer body (23) is inserted into a plurality of retainers groove (14) that is formed in the heat-treatment furnace (10), flatly is maintained;

  • It is characterized in that;

    retainer body (23) forms does not have the discoideus of otch, the axis that forms with this retainer body (23) at above-mentioned retainer body (23) is that the center is along the annular projection (24) that circumferentially extends and protrude towards the top, above-mentioned wafer (22,27) contacts top ground of above-mentioned projection (24) mounting in above-mentioned retainer body (23), when the diameter of above-mentioned wafer (22,27) is D, the external diameter of projection (24) is formed in the scope of 0.5D-0.98D, and the outer peripheral edges of above-mentioned wafer (22,27) are contact projection (24) not.

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