Substrate transport apparatus with multiple arms on common axis of rotation

Substrate transport apparatus with multiple arms on common axis of rotation

  • CN 1,332,667 A
  • Filed: 11/23/1999
  • Published: 01/23/2002
  • Est. Priority Date: 12/30/1998
  • Status: Abandoned Application
First Claim
Patent Images

1. a substrate transfer device has:

  • A drive division;

    Two arm assemblies of activity separately that are connected to this drive division on a common rotating shaft line;

    AndBe connected to the substrate holder on the arm assembly.

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