Spatter ion pump

Spatter ion pump

  • CN 1,366,706 A
  • Filed: 03/13/2001
  • Published: 08/28/2002
  • Est. Priority Date: 03/13/2000
  • Status: Abandoned Application
First Claim
Patent Images

1. getter pump, in vacuum tank, be provided with anode and negative electrode, by between two electrodes, adding high voltage, under the effect in magnetic field, make the electronics motion of spinning, the electronics that residual gas molecule and screw collides and is ionized, sputter cathode, be adsorbed onto on the surface etc. of anode, thereby carry out exhaust, its spy is, the shape of cross section of vacuum tank wall barrel makes concaveconvex shape, in each recess of the outside of this concavo-convex shape of cross section barrel, be provided with respectively and have same shape towards same pole orientation ground, the permanent magnet of same characteristic, the anode of tubular is set respectively at each recess of the inboard of this concavo-convex shape of cross section barrel and vacuum tank wall with leaving, with the barrel of vacuum tank wall as negative electrode, in vacuum tank, have tubular magnetic shielding part and the above-mentioned a plurality of permanent magnets and the configuration of the concentric shape of a plurality of anode ground of steam vent on making on every side, and axial symmetry respectively, arrange above-mentioned these a plurality of permanent magnets and a plurality of anode equally spacedly.

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