Method and device for regulating ion beam parallel in ion injection device

Method and device for regulating ion beam parallel in ion injection device

  • CN 1,441,465 A
  • Filed: 02/28/2002
  • Published: 09/10/2003
  • Est. Priority Date: 02/28/2002
  • Status: Active Application
First Claim
Patent Images

1. method of injecting ion in workpiece comprises step:

  • Produce ion beam;

    Ion beam is adjusted to required parallel degree;

    Measure the ion beam direction of the ion beam of being regulated;

    The ion beam direction that reference is measured is with the implant angle oriented workpiece;

    Implement to inject in order to the workpiece of implant angle orientation.

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