Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
Organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
- CN 1,447,981 A
- Filed: 08/20/2001
- Published: 10/08/2003
- Est. Priority Date: 08/21/2000
- Status: Abandoned Application
- EN CH
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- Pin
