Device for treating substrate

Device for treating substrate

  • CN 1,448,994 A
  • Filed: 03/28/2003
  • Published: 10/15/2003
  • Est. Priority Date: 03/28/2002
  • Status: Active Grant
First Claim
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1. a substrate board treatment transmits the substrate limit at the treatment trough inner edge and with treatment fluid substrate is handled, it is characterized in that,Dispose liquid storage container under the transfer roller of contacting substrate being supported and transmitting with the lower surface of substrate, have in this liquid storage container and to supply with moistening making with liquid and be full of moistening liquid supplying device with liquid in the liquid storage container all the time, the part outer peripheral face of said transfer roller is immersed in and is full of the moistening with in the liquid of said liquid storage container.

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