Method for making electronic devices including silicon and LTCC and devices produced thereby

Method for making electronic devices including silicon and LTCC and devices produced thereby

  • CN 1,494,739 A
  • Filed: 12/10/2001
  • Published: 05/05/2004
  • Est. Priority Date: 12/19/2000
  • Status: Active Application
First Claim
Patent Images

1. make a kind of method of electronics device, comprising:

  • Place first and second parts, make its facing surfaces contact with each other, first parts comprise silicon, and second parts comprise LTCC (LTCC) material;

    AndApparent surface to first and second parts carries out anodic bonding, to form the sealing-in of sealing betwixt.

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