Manufacture of micro jetting head with drive circuit

Manufacture of micro jetting head with drive circuit

  • CN 1,526,481 A
  • Filed: 04/03/2001
  • Published: 09/08/2004
  • Est. Priority Date: 04/03/2001
  • Status: Abandoned Application
First Claim
Patent Images

1. a making has the method for the mini projection head of drive circuit, and it comprises:

  • One substrate is provided;

    Form a dielectric layer on this substrate, this dielectric layer comprises one first position and one second position;

    Form one drive circuit on first position of this dielectric layer, this drive circuit comprises the more than one function element;

    Form a low-stress material layer on second position of this dielectric layer;

    This substrate of etching and this dielectric layer, forming a manifold and more than one fluid cavity, and this manifold system is connected with this fluid cavity, with accommodating fluid to this fluid cavity;

    Form a plurality of bubble generators on this low-stress material layer, and be connected with this drive circuit;

    AndForm more than one spray orifice, and be communicated with this corresponding fluid cavity to spray this fluid.

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