Electrosatatic capacity detector

Electrosatatic capacity detector

  • CN 1,538,143 A
  • Filed: 04/15/2004
  • Published: 10/20/2004
  • Est. Priority Date: 04/17/2003
  • Status: Active Application
First Claim
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1. , a kind of Electrosatatic capacity detector, it reads the surface configuration of this object by detecting the electrostatic capacitance that changes according to the distance with object, it is characterized in that,Comprise the indivedual power leads of M root, the indivedual output lines of N root that are configured to the capable N column matrix of M shape and be arranged on electrostatic capacitance detecting element on the intersection point of these indivedual power leads and these indivedual output lines;

  • This electrostatic capacitance detecting element comprises signal detection component and signal amplification component;

    This signal detection component comprises capacitance detecting electrode, capacitance detecting dielectric film and reference capacitor, and this reference capacitor is made of reference capacitor first electrode, reference capacitor dielectric film and reference capacitor second electrode;

    This signal amplification component is made of with MIS type thin film semiconductor device the signal amplification that gate electrode, gate insulating film and semiconductor film constituted.

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