Method and apparatus for growing semiconductor crystals with a rigid support with carbon doping and resistivity control and thermal gradient control
Method and apparatus for growing semiconductor crystals with a rigid support with carbon doping and resistivity control and thermal gradient control
- CN 1,543,518 A
- Filed: 07/03/2002
- Published: 11/03/2004
- Est. Priority Date: 07/05/2001
- Status: Abandoned Application
- EN CH
-
- Pin
