Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor

Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor

  • CN 1,564,780 A
  • Filed: 07/25/2002
  • Published: 01/12/2005
  • Est. Priority Date: 08/07/2001
  • Status: Active Application
First Claim
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1. make a kind of semiconductor component, especially have a method of a kind of thin film sensor of a semiconductor carrier, wherein the thin layer of a porous and a groove below this porous film layer have been made for the non-support structure that is formed for this member, it is characterized in that semiconductor carrier (1) obtains a kind of with the later different doping in groove position in the position of porous film layer (3);

  • Semi-conducting material for thin layer carries out porous;

    And the semi-conducting material below the semi-conducting material of porous is removed in order to make groove (2) or get rid of the part and replace.

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