Transfer chamber for cluster system

Transfer chamber for cluster system

  • CN 1,573,481 A
  • Filed: 06/02/2004
  • Published: 02/02/2005
  • Est. Priority Date: 06/02/2003
  • Status: Active Application
First Claim
Patent Images

1. transfer chamber that is used for cluster system, it is characterized in that:

  • described transfer chamber comprises;

    First main body;

    Be attached to second main body of a side of this first main body;

    AndThe lid that combines with the top of this first main body.

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