Thin film resonator, method for making thin film resonator and filter having thin film resonators
Thin film resonator, method for making thin film resonator and filter having thin film resonators
- CN 1,595,798 A
- Filed: 09/09/2004
- Published: 03/16/2005
- Est. Priority Date: 09/09/2003
- Status: Active Application
- EN CH
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- Pin
