Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated flu

Fluid actuating apparatus and method for manufacturing a fluid actuating apparatus, and electrostatically-actuated fluid discharge apparatus and process for producing an electrostatically-actuated flu

  • CN 1,660,691 A
  • Filed: 02/25/2005
  • Published: 08/31/2005
  • Est. Priority Date: 02/25/2004
  • Status: Active Application
First Claim
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1. fluid drive apparatus, it comprises:

  • Be used in fluid, providing the vibrating membrane of pressure variation;

    Form and be used to make the vibrating membrane lateral electrode of the described vibrating membrane of actuating for described vibrating membrane;

    Substrate-side electrode with the relative formation of described vibrating membrane lateral electrode;

    The space that between described vibrating membrane lateral electrode and described substrate-side electrode, forms;

    WithThe pillar that on described substrate-side electrode, forms and be used for described vibrating membrane lateral electrode being supported by described space;

    Wherein said vibrating membrane lateral electrode so forms, and makes it pass described pillar and extends to the bottom of described pillar and cover its part.

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