Method and apparatus for an improved baffle plate in a plasma processing system

Method and apparatus for an improved baffle plate in a plasma processing system

  • CN 1,682,339 B
  • Filed: 09/29/2003
  • Issued: 06/06/2012
  • Est. Priority Date: 09/30/2002
  • Status: Active Grant
First Claim
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1. improved baffle plate in the plasma process system comprises:

  • A curve ring;

    Comprise a upper surface;

    A lower surface;

    An interior radially edge that is coupled to said upper surface and said lower surface, an outer radial edge that is coupled to said upper surface and said lower surface, and at least one path that is coupled to said upper surface and said lower surface;

    Said at least one path is configured to allow the air communication mistake;

    Wherein said upper surface comprises first matching surface approaching with outer radial edge, and said lower surface comprises second matching surface approaching with said outer radial edge, said in radially the edge comprise an inner edge surface;

    And in said at least one path each comprises an internal path surface;

    Wherein said upper surface and said lower surface be with an angle tilt, and wherein said curve ring further comprises the said upper surface that is coupled to said baffle plate and said lower surface and be configured to accept fastening apparatus so that said baffle plate is coupled to a plurality of fastening recipient and a plurality of installation through holes of said plasma process system that the said upper surface of said curve ring comprises a depression;

    Said depression is radially between said a plurality of fastening recipients and said at least one path, and said depression has partial depth along the part of the periphery of curve ring at least;

    AndThe layer of protecting barrier layer;

    Be coupled to a plurality of exposed surfaces of said baffle plate;

    Wherein said exposed surface comprises;

    the said inner passageway surface of the said upper surface except that said first matching surface, the said lower surface except that said second matching surface, the extrorse said inner edge surface of said internal diameter and each said at least one path, said protection barrier layer are only partly within said depression.

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