High throughput inspection system and method for generating transmitted and/or reflected images

High throughput inspection system and method for generating transmitted and/or reflected images

  • CN 1,688,877 A
  • Filed: 08/06/2003
  • Published: 10/26/2005
  • Est. Priority Date: 08/08/2002
  • Status: Active Application
First Claim
Patent Images

1. one kind is detected an object optically to indicate the method for this object state, and this method comprises the following step at least:

  • (a), forming a short duration reflected beam, and make one second luminous beam penetrate the zone that this object comprises this first surface and a second surface simultaneously, so that a short duration transmitted beam to be provided by a surface reflection one first luminous beam in a zone of this object;

    (b) respond to this short duration reflected beam and this short duration transmitted beam, and response forms the output signal of a state in a plurality of these zones of reacting this object;

    Periodically repeat this step (a) with (b), up to a pre-defined part of this object by till the irradiation fully;

    AndHandle this output signal, with an indication of the state of pre-defined part that this object is provided.

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