Shut-off valve and method of shutting off opening of vacuum chamber
Shut-off valve and method of shutting off opening of vacuum chamber
- CN 1,690,490 B
- Filed: 04/21/2005
- Issued: 06/13/2012
- Est. Priority Date: 04/21/2004
- Status: Expired due to Fees
- EN CH
-
- Pin
